Electrical, material and multianalyte-sensitive characteristics of thermal CeO2/SiO2-stacked oxide capacitors

Chyuan Haur Kao; Hsiang Chen; Che Chun Liu; Chian Yu Chen; Yun Ti Chen; Yu Cheng Chu

doi:10.1016/j.tsf.2014.02.037

Electrical, material and multianalyte-sensitive characteristics of thermal CeO₂/SiO₂-stacked oxide capacitors

Chyuan Haur Kao, Hsiang Chen^*, Che Chun Liu, Chian Yu Chen, Yun Ti Chen, Yu Cheng Chu

^*Corresponding author for this work

Department of Electronic Engineering

Research output: Contribution to journal › Journal Article › peer-review

6 Scopus citations

Abstract

A CeO₂/SiO₂ stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na⁺, K⁺, urea, and glucose was conducted. CeO₂/SiO₂ sensing membranes show promise future industrial biosensing applications.

Original language	English
Pages (from-to)	552-557
Number of pages	6
Journal	Thin Solid Films
Volume	570
Issue number	PB
DOIs	https://doi.org/10.1016/j.tsf.2014.02.037
State	Published - 03 11 2014

Bibliographical note

Publisher Copyright:
© 2014 Elsevier B.V.

Keywords

Annealing
CeO/SiO
Membrane pH values
Multi-analyte sensing

Access to Document

10.1016/j.tsf.2014.02.037

Cite this

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title = "Electrical, material and multianalyte-sensitive characteristics of thermal CeO2/SiO2-stacked oxide capacitors",

abstract = "A CeO2/SiO2 stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na+, K+, urea, and glucose was conducted. CeO2/SiO2 sensing membranes show promise future industrial biosensing applications.",

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AU - Kao, Chyuan Haur

AU - Chen, Hsiang

AU - Liu, Che Chun

AU - Chen, Chian Yu

AU - Chen, Yun Ti

AU - Chu, Yu Cheng

PY - 2014/11/3

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AB - A CeO2/SiO2 stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na+, K+, urea, and glucose was conducted. CeO2/SiO2 sensing membranes show promise future industrial biosensing applications.

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KW - CeO/SiO

KW - Membrane pH values

KW - Multi-analyte sensing

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