Abstract
The InGaN/GaN light-emitting diode (LED) with a top p-GaN surface nanoroughened using Ni nanomasks and laser etching has been fabricated. The light output power of the InGaN/GaN LED with a nanoroughened top p-GaN surface is 1.55-fold that of a conventional LED. The series resistance of InGaN/GaN LED was reduced by 32% due to the increase in the contact area of the nanoroughened surface.
| Original language | English |
|---|---|
| Pages (from-to) | 3442-3445 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 45 |
| Issue number | 4 B |
| DOIs | |
| State | Published - 25 04 2006 |
| Externally published | Yes |
Keywords
- Excimer laser
- Gallium nitride (GaN)
- Light-emitting diode (LED)