eposition of n-type and p-type Aluminum Zinc Oxide Transparent Conductive Thin Films by RF Magnetron Sputtering Using Oxide Targets

Jo-Ling Lu, Chi-You Lai, Hsin-Chun Lu

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2008
Event	2008 Taiwan/Korea/Japan ChE Conference and 55th TWIChE Annual Conference - Taipei, Taiwan Duration: 20 11 2008 → 22 11 2008

Conference	2008 Taiwan/Korea/Japan ChE Conference and 55th TWIChE Annual Conference
Period	20/11/08 → 22/11/08

Cite this

@conference{a85c74e3ad3e40f1b8370f8b0fc2bd6f,

title = "eposition of n-type and p-type Aluminum Zinc Oxide Transparent Conductive Thin Films by RF Magnetron Sputtering Using Oxide Targets",

author = "Jo-Ling Lu and Chi-You Lai and Hsin-Chun Lu",

year = "2008",

language = "American English",

note = "2008 Taiwan/Korea/Japan ChE Conference and 55th TWIChE Annual Conference ; Conference date: 20-11-2008 Through 22-11-2008",

}