Abstract
In this work we demonstrate the uniform resistive switching (RS) behavior of Cu/Poly-Si/TiN CBRAM crossbar structure device. A significant improvement in endurance is demonstrated in Poly-Si CBRAM device compared to Silicon dioxide (SiO2) based device. The Cu/Poly-Si/TiN CBRAM device exhibits excellent memory performance, such as high ON/OFF resistance ratio, high endurance and good retention time (104 s). In addition to the experimental study, this work presents a numerical model for the Cu/Poly-Si/TiN CBRAM device. The simulation results based on this model perfectly match the experimental measurements.
| Original language | English |
|---|---|
| Title of host publication | 2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 217-219 |
| Number of pages | 3 |
| ISBN (Print) | 9781538637111 |
| DOIs | |
| State | Published - 26 07 2018 |
| Externally published | Yes |
| Event | 2nd IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Kobe, Japan Duration: 13 03 2018 → 16 03 2018 |
Publication series
| Name | 2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings |
|---|
Conference
| Conference | 2nd IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 |
|---|---|
| Country/Territory | Japan |
| City | Kobe |
| Period | 13/03/18 → 16/03/18 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.
Keywords
- CBRAM
- Poly-Si
- reliability
- resistive switching
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