Experimental investigation on the sputtering process for tantalum oxynitride thin films
- Chuan Li*
- , Jang Hsing Hsieh
- , Y. R. Chuang
*Corresponding author for this work
- National Yang Ming Chiao Tung University
- National Central University
- Ming Chi University of Technology
Research output: Contribution to journal › Journal Article › peer-review
5
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citations