Experimental Studies of High-Concentration Phosphorus Diffusion in Silicon

凌鈺庭

Research output: Types of ThesisDoctoral thesis

Translated title of the contribution高濃度磷摻雜於單晶矽中擴散之實驗與研究
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2012
Externally publishedYes

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