Experiments and Modeling of Phosphorus Segregation at the Si/SiO2 Interface

蔡宗叡

Research output: Types of ThesisDoctoral thesis

Translated title of the contribution磷在矽與二氧化矽界面偏析之實驗與模型
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2008
Externally publishedYes

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