Fabrication and simulation of antireflective nanostructures on c-Si solar cells

Ming Hsuan Kao; Ting Gang Chen; Min An Tsai; Hsin Chu Chen; Fang I. Lai; Shou Yi Kuo; Pei Chen Yu; Hao Chung Kuo

doi:10.1109/IQEC-CLEO.2011.6193978

Fabrication and simulation of antireflective nanostructures on c-Si solar cells

Ming Hsuan Kao^*
, Ting Gang Chen
, Min An Tsai
, Hsin Chu Chen
, Fang I. Lai
, Shou Yi Kuo
, Pei Chen Yu
, Hao Chung Kuo

^*Corresponding author for this work

Department of Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The enhanced photoelectric conversion is demonstrated in nanostructured photovoltaics using colloidal lithography and reactive-ion-etching (RIE) techniques. From the reflectance spectroscopy, trapezoid-cone arrays (TCAs) Si with SiNx passivation layer effectively suppress the reflection in the wavelength range from 400 nm to 1000 nm. The power conversion shows the TCAs Si solar cell with 120 nm thickness of SiNx passivation layer achieves 13.736%, which is 8.87% and 2.56% enhancement compared to the conventional KOH-textured photovoltaics and TCAs with 80-nm-thick SiNx, respectively. An optical simulation based on RCWA describes the optimized shape of nano structure to further reduce reflectance for maximum light absorption.

Original language	English
Title of host publication	2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf
Pages	1529-1531
Number of pages	3
DOIs	https://doi.org/10.1109/IQEC-CLEO.2011.6193978
State	Published - 2011
Event	2011 International Quantum Electronics Conference, IQEC 2011 and Conference on Lasers and Electro-Optics, CLEO Pacific Rim 2011 - Sydney, NSW, Australia Duration: 28 08 2011 → 01 09 2011

Publication series

Name	2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.

Conference

Conference	2011 International Quantum Electronics Conference, IQEC 2011 and Conference on Lasers and Electro-Optics, CLEO Pacific Rim 2011
Country/Territory	Australia
City	Sydney, NSW
Period	28/08/11 → 01/09/11

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

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10.1109/IQEC-CLEO.2011.6193978

Cite this

Kao, M. H., Chen, T. G., Tsai, M. A., Chen, H. C., Lai, F. I., Kuo, S. Y., Yu, P. C., & Kuo, H. C. (2011). Fabrication and simulation of antireflective nanostructures on c-Si solar cells. In 2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf (pp. 1529-1531). Article 6193978 (2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.). https://doi.org/10.1109/IQEC-CLEO.2011.6193978

Kao, Ming Hsuan ; Chen, Ting Gang ; Tsai, Min An et al. / Fabrication and simulation of antireflective nanostructures on c-Si solar cells. 2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf. 2011. pp. 1529-1531 (2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.).

@inproceedings{17965656280d4e50b8b082564c5cf82a,

title = "Fabrication and simulation of antireflective nanostructures on c-Si solar cells",

abstract = "The enhanced photoelectric conversion is demonstrated in nanostructured photovoltaics using colloidal lithography and reactive-ion-etching (RIE) techniques. From the reflectance spectroscopy, trapezoid-cone arrays (TCAs) Si with SiNx passivation layer effectively suppress the reflection in the wavelength range from 400 nm to 1000 nm. The power conversion shows the TCAs Si solar cell with 120 nm thickness of SiNx passivation layer achieves 13.736\%, which is 8.87\% and 2.56\% enhancement compared to the conventional KOH-textured photovoltaics and TCAs with 80-nm-thick SiNx, respectively. An optical simulation based on RCWA describes the optimized shape of nano structure to further reduce reflectance for maximum light absorption.",

author = "Kao, \{Ming Hsuan\} and Chen, \{Ting Gang\} and Tsai, \{Min An\} and Chen, \{Hsin Chu\} and Lai, \{Fang I.\} and Kuo, \{Shou Yi\} and Yu, \{Pei Chen\} and Kuo, \{Hao Chung\}",

year = "2011",

doi = "10.1109/IQEC-CLEO.2011.6193978",

language = "英语",

isbn = "9780977565771",

series = "2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.",

pages = "1529--1531",

booktitle = "2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf",

note = "2011 International Quantum Electronics Conference, IQEC 2011 and Conference on Lasers and Electro-Optics, CLEO Pacific Rim 2011 ; Conference date: 28-08-2011 Through 01-09-2011",

}

Kao, MH, Chen, TG, Tsai, MA, Chen, HC, Lai, FI, Kuo, SY, Yu, PC & Kuo, HC 2011, Fabrication and simulation of antireflective nanostructures on c-Si solar cells. in 2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf., 6193978, 2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf., pp. 1529-1531, 2011 International Quantum Electronics Conference, IQEC 2011 and Conference on Lasers and Electro-Optics, CLEO Pacific Rim 2011, Sydney, NSW, Australia, 28/08/11. https://doi.org/10.1109/IQEC-CLEO.2011.6193978

Fabrication and simulation of antireflective nanostructures on c-Si solar cells. / Kao, Ming Hsuan; Chen, Ting Gang; Tsai, Min An et al.
2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf. 2011. p. 1529-1531 6193978 (2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Fabrication and simulation of antireflective nanostructures on c-Si solar cells

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AU - Chen, Ting Gang

AU - Tsai, Min An

AU - Chen, Hsin Chu

AU - Lai, Fang I.

AU - Kuo, Shou Yi

AU - Yu, Pei Chen

AU - Kuo, Hao Chung

PY - 2011

Y1 - 2011

N2 - The enhanced photoelectric conversion is demonstrated in nanostructured photovoltaics using colloidal lithography and reactive-ion-etching (RIE) techniques. From the reflectance spectroscopy, trapezoid-cone arrays (TCAs) Si with SiNx passivation layer effectively suppress the reflection in the wavelength range from 400 nm to 1000 nm. The power conversion shows the TCAs Si solar cell with 120 nm thickness of SiNx passivation layer achieves 13.736%, which is 8.87% and 2.56% enhancement compared to the conventional KOH-textured photovoltaics and TCAs with 80-nm-thick SiNx, respectively. An optical simulation based on RCWA describes the optimized shape of nano structure to further reduce reflectance for maximum light absorption.

AB - The enhanced photoelectric conversion is demonstrated in nanostructured photovoltaics using colloidal lithography and reactive-ion-etching (RIE) techniques. From the reflectance spectroscopy, trapezoid-cone arrays (TCAs) Si with SiNx passivation layer effectively suppress the reflection in the wavelength range from 400 nm to 1000 nm. The power conversion shows the TCAs Si solar cell with 120 nm thickness of SiNx passivation layer achieves 13.736%, which is 8.87% and 2.56% enhancement compared to the conventional KOH-textured photovoltaics and TCAs with 80-nm-thick SiNx, respectively. An optical simulation based on RCWA describes the optimized shape of nano structure to further reduce reflectance for maximum light absorption.

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DO - 10.1109/IQEC-CLEO.2011.6193978

M3 - 会议稿件

AN - SCOPUS:84862104178

SN - 9780977565771

T3 - 2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.

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BT - 2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf

T2 - 2011 International Quantum Electronics Conference, IQEC 2011 and Conference on Lasers and Electro-Optics, CLEO Pacific Rim 2011

Y2 - 28 August 2011 through 1 September 2011

ER -

Kao MH, Chen TG, Tsai MA, Chen HC, Lai FI, Kuo SY et al. Fabrication and simulation of antireflective nanostructures on c-Si solar cells. In 2011 Int. Quantum Electr. Conf., IQEC 2011 Conf Lasers Electro-Optics, CLEO Pacific Rim 2011 Incorporating Australasian Conf. on Optics, Lasers Spectrosc. Australian Conf. Optical Fibre Technol.- Conf. 2011. p. 1529-1531. 6193978. (2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.). doi: 10.1109/IQEC-CLEO.2011.6193978

Fabrication and simulation of antireflective nanostructures on c-Si solar cells

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