| Translated title of the contribution | 射頻磁控濺鍍法製備之高介電常數氧化鉭薄膜之製程與特性 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 1998 |
| Externally published | Yes |
Fabrication Characteristic of High Dielectric Constant Ta2O5 Thin Film by Radio Frequency Magnetron Sputtering
楊瑞賢
Research output: Types of Thesis › Master's thesis