Fabrication of low-resistive p-type AZO thin films by N2 co-doping RF reactive magnetron sputtering

Gwo-Mei Wu, Chi-You Lai, Jo-Ling Lu, Hsin-Chun Lu

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2009
Event	the International Conference in Semiconductors-25 - saint petersburg Duration: 20 07 2009 → 24 07 2009

Conference	the International Conference in Semiconductors-25
Period	20/07/09 → 24/07/09

Cite this

@conference{5a2f87c02eb84725b5de34421755a8f8,

title = "Fabrication of low-resistive p-type AZO thin films by N2 co-doping RF reactive magnetron sputtering",

author = "Gwo-Mei Wu and Chi-You Lai and Jo-Ling Lu and Hsin-Chun Lu",

year = "2009",

language = "American English",

note = "the International Conference in Semiconductors-25 ; Conference date: 20-07-2009 Through 24-07-2009",

}