Fabrication of Rib Polymer Waveguides on Glass Substrates

Y. Z. Chen, G. M. Wu*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

Optical communication and optical information industry have progressed dramatically in the last decade. Parallel optical interconnection within computing and switching system has established as a key area for system integration. The development of waveguide coupler for transferring optical data at very high speeds provides technological challenges. In this study, rib polymer waveguides were prepared by UV-curing polymer resins and glass substrates using semiconductor processing technologies. The trenches the glass substrates were prepared by CF4/O2/Ar reactive ion etch. The core and the cladding layers were completed by spin coating and UV curing. The optical performance was also discussed.

Original languageEnglish
Pages (from-to)540-545
Number of pages6
JournalInternational SAMPE Symposium and Exhibition (Proceedings)
Volume48 I
StatePublished - 2003
EventAdvancing Materials in the Global Economy - Applications, Emerging Markets and Evolving Technologies - Long Beach, CA, United States
Duration: 11 05 200315 05 2003

Keywords

  • Optical Testing
  • Photolithography
  • Polymer Waveguide

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