Abstract
Optical communication and optical information industry have progressed dramatically in the last decade. Parallel optical interconnection within computing and switching system has established as a key area for system integration. The development of waveguide coupler for transferring optical data at very high speeds provides technological challenges. In this study, rib polymer waveguides were prepared by UV-curing polymer resins and glass substrates using semiconductor processing technologies. The trenches the glass substrates were prepared by CF4/O2/Ar reactive ion etch. The core and the cladding layers were completed by spin coating and UV curing. The optical performance was also discussed.
Original language | English |
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Pages (from-to) | 540-545 |
Number of pages | 6 |
Journal | International SAMPE Symposium and Exhibition (Proceedings) |
Volume | 48 I |
State | Published - 2003 |
Event | Advancing Materials in the Global Economy - Applications, Emerging Markets and Evolving Technologies - Long Beach, CA, United States Duration: 11 05 2003 → 15 05 2003 |
Keywords
- Optical Testing
- Photolithography
- Polymer Waveguide