Fault detection of the ion implanter using classification approach

Shin Yeu Lin; Shih Cheng Horng; Chi Hsing Tsai

Fault detection of the ion implanter using classification approach

Shin Yeu Lin^*
, Shih Cheng Horng
, Chi Hsing Tsai

^*Corresponding author for this work

National Yang Ming Chiao Tung University
Chin Min College

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this paper, we propose a fault detection scheme for an ion implanter using the classification approach. We employ a previously developed Hierarchical Fuzzy Rule Based Classifier (HFRBC) to classify the recipe of a working wafer in the ion implanter. The classification errors for various recipes of the HFRBC are treated as the accuracy of the classification result. Based on the classification results, we propose a warning signal generation criteria to minimize the probability of false alarm by excluding the possibility of electrical spikes and reducing the classification inaccuracy. We have tested the validity of our proposed warning signal for a 42-recipe case and obtained very successful results.

Original language	English
Title of host publication	2004 5th Asian Control Conference
Pages	809-814
Number of pages	6
State	Published - 2004
Externally published	Yes
Event	2004 5th Asian Control Conference - Melbourne, Australia Duration: 20 07 2004 → 23 07 2004

Publication series

Name	2004 5th Asian Control Conference
Volume	2

Conference

Conference	2004 5th Asian Control Conference
Country/Territory	Australia
City	Melbourne
Period	20/07/04 → 23/07/04

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Classification
Fault detection
Ion implanter
Semiconductor manufacturing

Cite this

@inproceedings{ae1d1f7205f147b6a30e4041f15bd6b4,

title = "Fault detection of the ion implanter using classification approach",

abstract = "In this paper, we propose a fault detection scheme for an ion implanter using the classification approach. We employ a previously developed Hierarchical Fuzzy Rule Based Classifier (HFRBC) to classify the recipe of a working wafer in the ion implanter. The classification errors for various recipes of the HFRBC are treated as the accuracy of the classification result. Based on the classification results, we propose a warning signal generation criteria to minimize the probability of false alarm by excluding the possibility of electrical spikes and reducing the classification inaccuracy. We have tested the validity of our proposed warning signal for a 42-recipe case and obtained very successful results.",

keywords = "Classification, Fault detection, Ion implanter, Semiconductor manufacturing",

author = "Lin, \{Shin Yeu\} and Horng, \{Shih Cheng\} and Tsai, \{Chi Hsing\}",

year = "2004",

language = "英语",

isbn = "0780388739",

series = "2004 5th Asian Control Conference",

pages = "809--814",

booktitle = "2004 5th Asian Control Conference",

note = "2004 5th Asian Control Conference ; Conference date: 20-07-2004 Through 23-07-2004",

}

TY - GEN

T1 - Fault detection of the ion implanter using classification approach

AU - Lin, Shin Yeu

AU - Horng, Shih Cheng

AU - Tsai, Chi Hsing

PY - 2004

Y1 - 2004

N2 - In this paper, we propose a fault detection scheme for an ion implanter using the classification approach. We employ a previously developed Hierarchical Fuzzy Rule Based Classifier (HFRBC) to classify the recipe of a working wafer in the ion implanter. The classification errors for various recipes of the HFRBC are treated as the accuracy of the classification result. Based on the classification results, we propose a warning signal generation criteria to minimize the probability of false alarm by excluding the possibility of electrical spikes and reducing the classification inaccuracy. We have tested the validity of our proposed warning signal for a 42-recipe case and obtained very successful results.

AB - In this paper, we propose a fault detection scheme for an ion implanter using the classification approach. We employ a previously developed Hierarchical Fuzzy Rule Based Classifier (HFRBC) to classify the recipe of a working wafer in the ion implanter. The classification errors for various recipes of the HFRBC are treated as the accuracy of the classification result. Based on the classification results, we propose a warning signal generation criteria to minimize the probability of false alarm by excluding the possibility of electrical spikes and reducing the classification inaccuracy. We have tested the validity of our proposed warning signal for a 42-recipe case and obtained very successful results.

KW - Classification

KW - Fault detection

KW - Ion implanter

KW - Semiconductor manufacturing

UR - https://www.scopus.com/pages/publications/16244369449

M3 - 会议稿件

AN - SCOPUS:16244369449

SN - 0780388739

T3 - 2004 5th Asian Control Conference

SP - 809

EP - 814

BT - 2004 5th Asian Control Conference

T2 - 2004 5th Asian Control Conference

Y2 - 20 July 2004 through 23 July 2004

ER -

Fault detection of the ion implanter using classification approach

Abstract

Publication series

Conference

UN SDGs

Keywords

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