Fermi-level Pinning and NBTI Free of CMOS HfO2 by Pre-CF4 Plasma Passivation

Huai-Hsien Chiu, Chao-Sung Lai, Jer-Chyi Wang

Research output: Contribution to conferenceProceeding

Original languageAmerican English
StatePublished - 2010
EventSolid State Devices and Materials (SSDM 2010) - Tokyo, Japan
Duration: 22 09 201024 09 2010

Conference

ConferenceSolid State Devices and Materials (SSDM 2010)
Period22/09/1024/09/10

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