Abstract
Pb1.2Zr1-xTix)O3 (PZT) films with a variety of compositions were prepared by spin coating on Pt/Ti/SiO2/Si substrate with sol-gel processing. The roles of composition (phase) and orientation in ferroelectric properties of PZT films have been determined. The Zr-rich PZT films with (111)-oriented PZT films have a higher remanent polarization but also show a higher fatigue rate as compared to (100)-oriented films in both Zr-rich(65/35) and Ti-rich(35/65) PZT compositions. The lower fatigue rate of (100)-oriented film can be attributed to its easier reversible domain-wall motions compared to (111)-oriented PZT films due to the absence of internal field stress and less dependence on electrical field. A mode based on domain-wall contribution instead of film-electrode interface is favored to elucidate the role of orientation in fatigue characteristics of PZT films.
| Original language | English |
|---|---|
| Pages (from-to) | 2970-2974 |
| Number of pages | 5 |
| Journal | Journal of Applied Physics |
| Volume | 90 |
| Issue number | 6 |
| DOIs | |
| State | Published - 15 09 2001 |
| Externally published | Yes |