Finline technology for millimeter wave MEMs

Jeffrey S. Fu; Jiaoyun Zhou; Yilong Lu; Jianguo Ma; Zhongxiang Shen

doi:10.1117/12.487702

Finline technology for millimeter wave MEMs

Jeffrey S. Fu^*, Jiaoyun Zhou, Yilong Lu, Jianguo Ma, Zhongxiang Shen

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Conference article › peer-review

Abstract

Recent development of finline 35 GHz MEM modules like Gunn oscillator. PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.

Original language	English
Pages (from-to)	523-530
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5116 II
DOIs	https://doi.org/10.1117/12.487702
State	Published - 2003
Externally published	Yes
Event	Smart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain Duration: 19 05 2003 → 21 05 2003

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10.1117/12.487702

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@article{5bf619c59b4c4370a42d176287e5b43f,

title = "Finline technology for millimeter wave MEMs",

abstract = "Recent development of finline 35 GHz MEM modules like Gunn oscillator. PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.",

author = "Fu, {Jeffrey S.} and Jiaoyun Zhou and Yilong Lu and Jianguo Ma and Zhongxiang Shen",

year = "2003",

doi = "10.1117/12.487702",

language = "英语",

volume = "5116 II",

pages = "523--530",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Smart Sensors, Actuators, and MEMS ; Conference date: 19-05-2003 Through 21-05-2003",

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TY - JOUR

T1 - Finline technology for millimeter wave MEMs

AU - Fu, Jeffrey S.

AU - Zhou, Jiaoyun

AU - Lu, Yilong

AU - Ma, Jianguo

AU - Shen, Zhongxiang

PY - 2003

Y1 - 2003

N2 - Recent development of finline 35 GHz MEM modules like Gunn oscillator. PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.

AB - Recent development of finline 35 GHz MEM modules like Gunn oscillator. PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.

UR - http://www.scopus.com/inward/record.url?scp=0041828500&partnerID=8YFLogxK

U2 - 10.1117/12.487702

DO - 10.1117/12.487702

M3 - 会议文章

AN - SCOPUS:0041828500

SN - 0277-786X

VL - 5116 II

SP - 523

EP - 530

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Sensors, Actuators, and MEMS

Y2 - 19 May 2003 through 21 May 2003

ER -

Finline technology for millimeter wave MEMs

Abstract

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