Fluorine effects on the dipole structures of the Al2 O3 thin films and characterization by spectroscopic ellipsometry

Chao Sung Lai*, Kung Ming Fan, Hsing Kan Peng, Shian Jyh Lin, Chung Yuan Lee, Chi Fong Ai

*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

19 Scopus citations

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