Abstract
A GaN-based metal–semiconductor–metal varactor with a two-dimensional electron gas (2DEG) layer is proposed and fabricated. The capacitance variation of this fabricated varactor biased at different external voltages is studied and measured, and the frequency-dependent capacitance and resistance of the varactor are simulated by a corresponding empirical formula. A high-frequency protective filter is further constructed and placed under a large pulsed-current injection in a malicious electromagnetic interference immunity test. The results show that the proposed GaN-based module can reduce the large pulsed current to an acceptably small level. Thus, the GaN-based 2DEG varactor is an attractive candidate for applications designed to protect the upcoming 5G high-frequency system from risks such as electrostatic discharge, lightning, and electromagnetic pulses.
| Original language | English |
|---|---|
| Pages (from-to) | 6798-6805 |
| Number of pages | 8 |
| Journal | Journal of Electronic Materials |
| Volume | 49 |
| Issue number | 11 |
| DOIs | |
| State | Published - 01 11 2020 |
Bibliographical note
Publisher Copyright:© 2020, The Author(s).
Keywords
- GaN metal–semiconductor–metal varactor
- malicious electromagnetic interference
- two-dimensional electron gas