Abstract
The progress in the fabrication of high voltage GaN and AlGaN rectifiers, GaN/AlGaN HBT and GaN MOSFET is reviewed. Improvements in epitaxial layer quality are studied. The advances in fabrication techniques that led to the improvement of device performance are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 227-231 |
| Number of pages | 5 |
| Journal | Materials Science and Engineering: B |
| Volume | 82 |
| Issue number | 1-3 |
| DOIs | |
| State | Published - 22 05 2001 |
| Externally published | Yes |
Keywords
- Bipolar transistors
- GaN
- MOSFETs
- Rectifiers