Gd2O3 pMOSFET With HfMoN Metal Gate and S/D Fluorine Implantation Under Negative Bias Temperature Instability (NBTI) Stress

  • 李明哲

Research output: Types of Thesis › Master's thesis

Translated title of the contribution利用氮化鉿鉬金屬閘極及源/汲極氟摻雜在三氧化二釓之p型金氧半場效電晶體負偏壓溫度不穩定測試之研究
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Wang, Jer-Chyi, Supervisor
StatePublished - 2010
Externally publishedYes

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