Growth of carbon nanotubes via rapid thermal processing from sputtered amorphous carbon

Carbon Nanotubes (CNT) were grown from amorphous carbon film when the top catalyst layer can agglomerate into nanoparticles during rapid thermal processing. The CNT grown with Co are longer and exhibit alignment at the perimeter of the substrate, while those grown with Au are straighter and denser. One large catalyst particle can support multiple CNT growth, and the effect is more pronounced with Au nanoparticles. Introduction of ethanol vapour during the thermal process increases the yield of the CNT grown with both catalysts.