High-k Yb2O3 thin films as a sensing membrane for pH-ISFET application

Tung Ming Pan; Fa Hsyang Chen; Cheng Da Lee; Yu Kai Chien; Ho Ming Ko

doi:10.1109/ISDRS.2009.5378146

High-k Yb₂O₃ thin films as a sensing membrane for pH-ISFET application

Tung Ming Pan^*, Fa Hsyang Chen, Cheng Da Lee, Yu Kai Chien, Ho Ming Ko

^*Corresponding author for this work

Department of Electronic Engineering

Chang Gung University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Original language	English
Title of host publication	2009 International Semiconductor Device Research Symposium, ISDRS '09
DOIs	https://doi.org/10.1109/ISDRS.2009.5378146
State	Published - 2009
Event	2009 International Semiconductor Device Research Symposium, ISDRS '09 - College Park, MD, United States Duration: 09 12 2009 → 11 12 2009

Publication series

Name	2009 International Semiconductor Device Research Symposium, ISDRS '09

Conference

Conference	2009 International Semiconductor Device Research Symposium, ISDRS '09
Country/Territory	United States
City	College Park, MD
Period	09/12/09 → 11/12/09

Access to Document

10.1109/ISDRS.2009.5378146

Cite this

@inproceedings{286541f5260f48668505088d4cd567e1,

title = "High-k Yb2O3 thin films as a sensing membrane for pH-ISFET application",

author = "Pan, {Tung Ming} and Chen, {Fa Hsyang} and Lee, {Cheng Da} and Chien, {Yu Kai} and Ko, {Ho Ming}",

year = "2009",

doi = "10.1109/ISDRS.2009.5378146",

language = "英语",

isbn = "9781424460304",

series = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

booktitle = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

note = "2009 International Semiconductor Device Research Symposium, ISDRS '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

Pan, TM, Chen, FH, Lee, CD, Chien, YK & Ko, HM 2009, High-k Yb₂O₃ thin films as a sensing membrane for pH-ISFET application. in 2009 International Semiconductor Device Research Symposium, ISDRS '09., 5378146, 2009 International Semiconductor Device Research Symposium, ISDRS '09, 2009 International Semiconductor Device Research Symposium, ISDRS '09, College Park, MD, United States, 09/12/09. https://doi.org/10.1109/ISDRS.2009.5378146

High-k Yb₂O₃ thin films as a sensing membrane for pH-ISFET application. / Pan, Tung Ming; Chen, Fa Hsyang; Lee, Cheng Da et al.
2009 International Semiconductor Device Research Symposium, ISDRS '09. 2009. 5378146 (2009 International Semiconductor Device Research Symposium, ISDRS '09).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Pan, Tung Ming

AU - Chen, Fa Hsyang

AU - Lee, Cheng Da

AU - Chien, Yu Kai

AU - Ko, Ho Ming

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M3 - 会议稿件

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SN - 9781424460304

T3 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

BT - 2009 International Semiconductor Device Research Symposium, ISDRS '09

T2 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

Y2 - 9 December 2009 through 11 December 2009

ER -