High-k Yb2O3 thin films as a sensing membrane for pH-ISFET application

Tung Ming Pan*, Fa Hsyang Chen, Cheng Da Lee, Yu Kai Chien, Ho Ming Ko

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations
Original languageEnglish
Title of host publication2009 International Semiconductor Device Research Symposium, ISDRS '09
DOIs
StatePublished - 2009
Event2009 International Semiconductor Device Research Symposium, ISDRS '09 - College Park, MD, United States
Duration: 09 12 200911 12 2009

Publication series

Name2009 International Semiconductor Device Research Symposium, ISDRS '09

Conference

Conference2009 International Semiconductor Device Research Symposium, ISDRS '09
Country/TerritoryUnited States
CityCollege Park, MD
Period09/12/0911/12/09

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