Abstract
This work presents a comparison between the La2O3 and La2Ti2O7 sensing membranes for solution-based capacitive electrolyte-insulator-semiconductor (EIS) pH sensors. The La2O3 and La2Ti2O7 sensing membranes were fabricated through a simple spin-coating method. The structural characteristics of these sensing membranes were examined by using X-ray photoelectron spectroscopy and X-ray diffraction. The La2Ti2O7 EIS sensor made using the spin-coating process demonstrated a higher sensitivity of 70.60 mV/pH, a smaller drift rate of 0.14 mV/h and a lower hysteresis voltage of 1 mV, as compared to the La2O3 EIS sensor.
Original language | English |
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Article number | 9340329 |
Pages (from-to) | 414-417 |
Number of pages | 4 |
Journal | IEEE Electron Device Letters |
Volume | 42 |
Issue number | 3 |
DOIs | |
State | Published - 03 2021 |
Bibliographical note
Publisher Copyright:© 1980-2012 IEEE.
Keywords
- Electrolytend-insulator-semiconductor (EIS)
- LaO
- LaTiO
- pH sensor
- spin-coating process