High-Performance Solution-Processed LaTiO Sensing Film for a Capacitive Electrolyte-Insulator-Semiconductor pH Sensor

Prabir Garu, Sankar Prasad Bag, Tung Ming Pan*

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

4 Scopus citations

Abstract

This work presents a comparison between the La2O3 and La2Ti2O7 sensing membranes for solution-based capacitive electrolyte-insulator-semiconductor (EIS) pH sensors. The La2O3 and La2Ti2O7 sensing membranes were fabricated through a simple spin-coating method. The structural characteristics of these sensing membranes were examined by using X-ray photoelectron spectroscopy and X-ray diffraction. The La2Ti2O7 EIS sensor made using the spin-coating process demonstrated a higher sensitivity of 70.60 mV/pH, a smaller drift rate of 0.14 mV/h and a lower hysteresis voltage of 1 mV, as compared to the La2O3 EIS sensor.

Original languageEnglish
Article number9340329
Pages (from-to)414-417
Number of pages4
JournalIEEE Electron Device Letters
Volume42
Issue number3
DOIs
StatePublished - 03 2021

Bibliographical note

Publisher Copyright:
© 1980-2012 IEEE.

Keywords

  • Electrolytend-insulator-semiconductor (EIS)
  • LaO
  • LaTiO
  • pH sensor
  • spin-coating process

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