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Hysteresis in gadolinium oxide metal-oxide-semiconductor capacitors

  • Li Zen Hsieh*
  • , Hong Hsi Ko
  • , Ping Yu Kuei
  • , Liann Be Chang
  • , Ming Jer Jeng
  • *Corresponding author for this work
  • National Defense University Taiwan
  • Chang Gung University
  • St. John's University Taiwan

Research output: Contribution to journal › Journal Article › peer-review

7 Scopus citations

Abstract

This investigation explores how oxidation affects the gadolinium oxide capacitor and the corresponding Gd2 O3 hysteresis phenomenon. The current-voltage varied with Gd2 O3 thickness and a charged capacitance voltage (C-V) curve with a left shift is also observed in experimental results. The breakdown voltages rise with increasing oxidation time, while the corresponding C-V hysteresis gaps decrease with increasing oxidation time.

Original languageEnglish
Article number076110
JournalJournal of Applied Physics
Volume98
Issue number7
DOIs
StatePublished - 01 10 2005
Externally publishedYes

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