Impact of High-K Offset Spacer in 65-nm Node SOI Devices

Ming Wen Ma, Tan Fu Lei, Chien Hung Wu, Shui Jinn Wang, Tsung Yu Yang, Kuo Hsing Kao, Woei Cherng Wu, Tien Sheng Chao

Research output: Contribution to journalJournal Article peer-review

25 Scopus citations

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