Impact of N₂ flow variations in TiN buffer layers on the ferroelectric and structural properties of TiN/HZO/TiN capacitors for nonvolatile memory applications

莊士霆

Research output: Types of ThesisMaster's thesis

Translated title of the contribution調整 TiN 緩衝層製程中氮氣流量變化對 TiN/HZO/TiN 電容之鐵電與結構特性的影響及非揮發性記憶體之應用
Original languageEnglish
Supervisors/Advisors
  • Pan, Tung-Ming, Supervisor
StatePublished - 2025
Externally publishedYes

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