Improved Dielectric Phase and Interfacial Dipole Control of Gd2O3-doped HfO2 Gate Dielectrics by Co-sputtering Technique

Pai-Chi Chou, Jer-Chyi Wang, Woei-Cherng Wu, Chao-Sung Lai

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2009
Event	2009 Materials Research Society Fall Meeting - Boston, MA, USA Duration: 30 11 2009 → 04 12 2009

Conference	2009 Materials Research Society Fall Meeting
Period	30/11/09 → 04/12/09

Cite this

@conference{6402fa7de1394eae925eb089eb96f14a,

title = "Improved Dielectric Phase and Interfacial Dipole Control of Gd2O3-doped HfO2 Gate Dielectrics by Co-sputtering Technique",

author = "Pai-Chi Chou and Jer-Chyi Wang and Woei-Cherng Wu and Chao-Sung Lai",

year = "2009",

language = "American English",

note = "2009 Materials Research Society Fall Meeting ; Conference date: 30-11-2009 Through 04-12-2009",

}