Improved in dry routing performance with optimized diamond-like carbon films

C. T. Guo, H. Y. Ueng*

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

2 Scopus citations


The efficiency of cutting tools was increased by deposition diamond-like carbon (DLC) films on microrouter bits to improve the chip flow and reduce cutting force. DLC films deposited under a mixture of acetylene/argon plasma in a large area and three dimensional deposition electron cyclotron resonance (ECR) system. Router bit performance in dry routing of FR-4 type printed circuit board was evaluated by inspecting the surface roughness of trench sidewalls and the routing precision width tolerance. By optimizing deposition conditions, the DLC lubricant-coated microrouter bits achieve a better enhancement in performance. Surface analysis with scanning electron microscopy reveals that DLC coated microrouters exhibit lower friction and enhance the anti-adhering properties of the microrouter, resulting in significant improvements in routing quality. The microstructure and chemical configuration are investigated by Raman spectroscopy and X-ray photoelectron spectroscopy, respectively. The routing efficiency shows a high dependence on the microstructure of DLC coating, which varies with deposition conditions, in particular with substrate bias voltage.

Original languageEnglish
Pages (from-to)304-310
Number of pages7
StatePublished - 09 2014


  • DLC
  • Dry routing
  • Efficiency
  • Hybrid coating
  • Raman


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