Improved productivity on diamond-like carbon coating optical disk stamper

H. Y. Ueng*, C. T. Guo

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

6 Scopus citations
Original languageEnglish
Pages (from-to)2540-2544
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
StatePublished - 2003
Externally publishedYes

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