Original language | English |
---|---|
Pages (from-to) | 2540-2544 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 21 |
Issue number | 6 |
DOIs | |
State | Published - 2003 |
Externally published | Yes |
Improved productivity on diamond-like carbon coating optical disk stamper
H. Y. Ueng*, C. T. Guo
*Corresponding author for this work
Research output: Contribution to journal › Journal Article › peer-review
6
Scopus
citations