Improved productivity on diamond-like carbon coating optical disk stamper

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

6 Scopus citations

Original language	English
Pages (from-to)	2540-2544
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1624271
State	Published - 2003
Externally published	Yes

Access to Document

@article{029a3d4545884e5c93b4f9283d590ea3,

title = "Improved productivity on diamond-like carbon coating optical disk stamper",

author = "Ueng, \{H. Y.\} and Guo, \{C. T.\}",

year = "2003",

doi = "10.1116/1.1624271",

language = "英语",

volume = "21",

pages = "2540--2544",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Improved productivity on diamond-like carbon coating optical disk stamper

AU - Ueng, H. Y.

AU - Guo, C. T.

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/0942299747

U2 - 10.1116/1.1624271

DO - 10.1116/1.1624271

M3 - 文章

AN - SCOPUS:0942299747

SN - 1071-1023

VL - 21

SP - 2540

EP - 2544

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -