Abstract
A conventional approach of doping to control the bistable resistance switching in Yb 2O 3 was investigated for nonvolatile memory applications. With the help of Ti doping into oxide films during the process, better cycle-to-cycle resistance distribution and switching voltage uniformity were found due to modulation of current conduction mechanism from space-charge-limited current in Yb 2O 3 to Schottky type in YbTiO x. The program/erase cycles with successive readout operation over 10 5 cycles can be achieved without any degradation. No data loss was found upon continuous readout process at both room temperature and 85 ° C The Ni/YbTiO xTaN memory is a promising candidate to be integrated into future memory processes.
Original language | English |
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Article number | 6203359 |
Pages (from-to) | 1069-1071 |
Number of pages | 3 |
Journal | IEEE Electron Device Letters |
Volume | 33 |
Issue number | 7 |
DOIs | |
State | Published - 2012 |
Keywords
- Doping
- Ni
- TaN
- Yb O
- YbTiO
- resistive random access memory (ReRAM)