Abstract
A conventional approach of doping to control the bistable resistance switching in Yb 2O 3 was investigated for nonvolatile memory applications. With the help of Ti doping into oxide films during the process, better cycle-to-cycle resistance distribution and switching voltage uniformity were found due to modulation of current conduction mechanism from space-charge-limited current in Yb 2O 3 to Schottky type in YbTiO x. The program/erase cycles with successive readout operation over 10 5 cycles can be achieved without any degradation. No data loss was found upon continuous readout process at both room temperature and 85 ° C The Ni/YbTiO xTaN memory is a promising candidate to be integrated into future memory processes.
| Original language | English |
|---|---|
| Article number | 6203359 |
| Pages (from-to) | 1069-1071 |
| Number of pages | 3 |
| Journal | IEEE Electron Device Letters |
| Volume | 33 |
| Issue number | 7 |
| DOIs | |
| State | Published - 2012 |
Keywords
- Doping
- Ni
- TaN
- Yb O
- YbTiO
- resistive random access memory (ReRAM)