Improved surge protection of flip-chip gallium nitride-based HEMTs by metal-semiconductor-metal two-dimensional electron gas varactor

Liann Be Chang, Chien Fu Shih, Tung Wuu Huang, Chu Yeh Tien, Ping Yu Kuei

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

AlGaN/GaN high electron mobility transistor (HEMT) was designed with improved surge protection characteristic through the use of a MSM-2DEG varactor connected in series to the gate of HEMT. Under an ESD surge stress of 1100 V or below, the HEMT incorporating this protection feature doesn't exhibit any change because the surge stress can be directly blocked by the MSM-2DEG varactor. Furthermore, flip-chip (FC) technology was also used to further improve the thermal performance and reliability of HEMTs. The heat generated in the two-dimensional electron gas (2DEG) channel of HEMT flows directly through the interconnect metal to the submount, and hence improve the thermal conduction. Based on these results, the proposed flip-chip HEMT with MSM-2DEG varactor can effectively improve the surge protection characteristics.

Original languageEnglish
Title of host publicationEMC 2014/Tokyo - 2014 International Symposium on Electromagnetic CompatibiIity, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages717-720
Number of pages4
ISBN (Electronic)9784885522871
StatePublished - 23 12 2014
Event2014 International Symposium on Electromagnetic CompatibiIity, EMC 2014 - Tokyo, Japan
Duration: 12 05 201416 05 2014

Publication series

NameIEEE International Symposium on Electromagnetic Compatibility
Volume2014-December
ISSN (Print)1077-4076
ISSN (Electronic)2158-1118

Conference

Conference2014 International Symposium on Electromagnetic CompatibiIity, EMC 2014
Country/TerritoryJapan
CityTokyo
Period12/05/1416/05/14

Bibliographical note

Publisher Copyright:
© 2014 The Institute of Electronics, Information and Communication Engineer.

Keywords

  • GaN
  • flip-chip
  • high electron mobility transistor (HEMT)
  • surge protection
  • varactor

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