| Original language | American English |
|---|---|
| State | Published - 2011 |
| Event | 2011 International Workshop on Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-11) - Tokyo, Japan Duration: 20 01 2011 → 21 01 2011 |
Conference
| Conference | 2011 International Workshop on Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-11) |
|---|---|
| Period | 20/01/11 → 21/01/11 |