Improvement of HfO2 by Reactive Sputter of Optimized Oxygen Content and Post Deposition Annealing

鄒百騏

Research output: Types of ThesisMaster's thesis

Translated title of the contribution射頻濺鍍氬氣及氧氣流量調變二氧化鉿特性影響以及RTA高溫加熱分析
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2005
Externally publishedYes

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