| Translated title of the contribution | 射頻濺鍍氬氣及氧氣流量調變二氧化鉿特性影響以及RTA高溫加熱分析 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2005 |
| Externally published | Yes |
Improvement of HfO2 by Reactive Sputter of Optimized Oxygen Content and Post Deposition Annealing
鄒百騏
Research output: Types of Thesis › Master's thesis