Improvements of poly depletion effects by TiN barrier modification on the 50nm DRAM

  • 林宜君

Research output: Types of Thesis › Master's thesis

Translated title of the contribution調變氮化鈦阻擋層改善50奈米動態隨機存取記憶體之多晶矽閘極空乏效應
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Yang, Chia-Ming, Supervisor
StatePublished - 2011
Externally publishedYes

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