Abstract
An approach improving diamond-metal adhesion has been developed based on modeling predictions and experimental verifications on the interfacial stresses modified by catalytic reaction. It is found that N-plasma irradiating onto Ti and tungsten-carbide substrates generates tensile surface stresses while C-plasma irradiation creates strongly compressive stress at the surfaces, both of which deteriorate the diamond-metal adhesion. It is also found that surface oxidation prevents diamond nucleation. Therefore, we applied a graded TiCN interlayer with carefully adjusting the ratio of C and N in the gas mixture to neutralize the interfacial stress and, hence, we have improved the diamond-metal adhesion substantially.
| Original language | English |
|---|---|
| Pages (from-to) | 2051-2054 |
| Number of pages | 4 |
| Journal | Journal of Applied Physics |
| Volume | 91 |
| Issue number | 3 |
| DOIs | |
| State | Published - 01 02 2002 |
| Externally published | Yes |