Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates

S. K. Samanta, S. Chatterjee, S. Maikap, L. K. Bera, H. D. Banerjee, C. K. Maiti*

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

11 Scopus citations

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Biochemistry, Genetics and Molecular Biology