Interferometric differential phase ellipsometer

Chien Chou; Hui Kang Teng

doi:10.1109/CLEOPR.2003.1277012

Interferometric differential phase ellipsometer

Chien Chou
, Hui Kang Teng

National Yang Ming Chiao Tung University
Nan Kai University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present a differential phase detection scheme which incorporates a common-path optical heterodyne interferometer to measure the ellipsometric parameters in near real time.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	462
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1277012
State	Published - 2003
Externally published	Yes
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 15 12 2003 → 19 12 2003

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2

Conference

Conference	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan
City	Taipei
Period	15/12/03 → 19/12/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Access to Document

10.1109/CLEOPR.2003.1277012

Cite this

Chou, C., & Teng, H. K. (2003). Interferometric differential phase ellipsometer. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings (pp. 462). Article 1277012 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1277012

Chou, Chien ; Teng, Hui Kang. / Interferometric differential phase ellipsometer. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 462 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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abstract = "We present a differential phase detection scheme which incorporates a common-path optical heterodyne interferometer to measure the ellipsometric parameters in near real time.",

author = "Chien Chou and Teng, \{Hui Kang\}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",

year = "2003",

doi = "10.1109/CLEOPR.2003.1277012",

language = "英语",

series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

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Chou, C & Teng, HK 2003, Interferometric differential phase ellipsometer. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1277012, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 462, 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 15/12/03. https://doi.org/10.1109/CLEOPR.2003.1277012

Interferometric differential phase ellipsometer. / Chou, Chien; Teng, Hui Kang.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. p. 462 1277012 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - We present a differential phase detection scheme which incorporates a common-path optical heterodyne interferometer to measure the ellipsometric parameters in near real time.

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DO - 10.1109/CLEOPR.2003.1277012

M3 - 会议稿件

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T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

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BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003

Y2 - 15 December 2003 through 19 December 2003

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Chou C, Teng HK. Interferometric differential phase ellipsometer. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. p. 462. 1277012. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2003.1277012

Interferometric differential phase ellipsometer

Abstract

Publication series

Conference

Bibliographical note

Access to Document

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Cite this