Investigation of Arsenic Dose Loss in Silicon on Insulator

陳文俊

Research output: Types of ThesisMaster's thesis

Translated title of the contribution砷在絕緣層上矽之摻雜劑量損失研究
Original languageAmerican English
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2006
Externally publishedYes

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