Investigation of chemical bath deposition of CdO thin films using three different complexing agents

Hani Khallaf, Chia Ta Chen, Liann Be Chang, Oleg Lupan, Aniruddha Dutta, Helge Heinrich, A. Shenouda, Lee Chow*

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

103 Scopus citations

Abstract

Chemical bath deposition of CdO thin films using three different complexing agents, namely ammonia, ethanolamine, and methylamine is investigated. CdSO 4 is used as Cd precursor, while H 2 O 2 is used as an oxidation agent. As-grown films are mainly cubic CdO 2 , with some Cd(OH) 2 as well as CdO phases being detected. Annealing at 400 °C in air for 1 h transforms films into cubic CdO. The calculated optical band gap of as-grown films is in the range of 3.37-4.64 eV. Annealed films have a band gap of about 2.53 eV. Rutherford backscattering spectroscopy of as-grown films reveals cadmium to oxygen ratio of 1.00:1.74 ± 0.01 while much better stoichiometry is obtained after annealing, in accordance with the X-ray diffraction results. A carrier density as high as 1.89 × 10 20 cm -3 and a resistivity as low as 1.04 × 10 -2 Ω-cm are obtained.

Original languageEnglish
Pages (from-to)9237-9242
Number of pages6
JournalApplied Surface Science
Volume257
Issue number22
DOIs
StatePublished - 01 09 2011
Externally publishedYes

Keywords

  • CdO
  • Chemical bath deposition
  • Group II-VI Semiconductors
  • Thin films

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