Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes

Chi Hsiang Kuo; Shing Yih Shih; Chang Rang Wu; Jeng Ping Lin; Pei Ing Lee

Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes

Chi Hsiang Kuo, Shing Yih Shih, Chang Rang Wu, Jeng Ping Lin, Pei Ing Lee

Nanya Technology Corporation

Research output: Contribution to conference › Conference Paper › peer-review

1 Scopus citations

Abstract

The aspect ratio (AR) of shallow isolation trench (STI) structures will increase as device feature size continues to shrink. Complicated HDP CVD processes or alternative gap-fill approaches, which lead to severe overfill topographies, will be proposed. However, those kinds of topographies will make great impacts on the STI CMP process, endpoint detection (EPD) especially. The EPD process control is crucial to manufacturability. In this paper, the characteristic of the motor-current EPD system, monitoring a direct STI CMP process with acid ceria-based slurry, has been studied on various STI gap-fill schemes. The EPD signals are sensitive to topographies, and show quadratic relationship between the processing time and overfill features.

Original language	English
Pages	119-122
Number of pages	4
State	Published - 2006
Externally published	Yes
Event	11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006 - Fremont, CA, United States Duration: 21 02 2006 → 23 02 2006

Conference

Conference	11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006
Country/Territory	United States
City	Fremont, CA
Period	21/02/06 → 23/02/06

Cite this

Kuo, C. H., Shih, S. Y., Wu, C. R., Lin, J. P., & Lee, P. I. (2006). Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes. 119-122. Paper presented at 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006, Fremont, CA, United States.

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title = "Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes",

abstract = "The aspect ratio (AR) of shallow isolation trench (STI) structures will increase as device feature size continues to shrink. Complicated HDP CVD processes or alternative gap-fill approaches, which lead to severe overfill topographies, will be proposed. However, those kinds of topographies will make great impacts on the STI CMP process, endpoint detection (EPD) especially. The EPD process control is crucial to manufacturability. In this paper, the characteristic of the motor-current EPD system, monitoring a direct STI CMP process with acid ceria-based slurry, has been studied on various STI gap-fill schemes. The EPD signals are sensitive to topographies, and show quadratic relationship between the processing time and overfill features.",

author = "Kuo, {Chi Hsiang} and Shih, {Shing Yih} and Wu, {Chang Rang} and Lin, {Jeng Ping} and Lee, {Pei Ing}",

year = "2006",

language = "英语",

pages = "119--122",

note = "11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006 ; Conference date: 21-02-2006 Through 23-02-2006",

}

Kuo, CH, Shih, SY, Wu, CR, Lin, JP & Lee, PI 2006, 'Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes', Paper presented at 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006, Fremont, CA, United States, 21/02/06 - 23/02/06 pp. 119-122.

Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes. / Kuo, Chi Hsiang; Shih, Shing Yih; Wu, Chang Rang et al.
2006. 119-122 Paper presented at 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006, Fremont, CA, United States.

Research output: Contribution to conference › Conference Paper › peer-review

TY - CONF

T1 - Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes

AU - Kuo, Chi Hsiang

AU - Shih, Shing Yih

AU - Wu, Chang Rang

AU - Lin, Jeng Ping

AU - Lee, Pei Ing

PY - 2006

Y1 - 2006

N2 - The aspect ratio (AR) of shallow isolation trench (STI) structures will increase as device feature size continues to shrink. Complicated HDP CVD processes or alternative gap-fill approaches, which lead to severe overfill topographies, will be proposed. However, those kinds of topographies will make great impacts on the STI CMP process, endpoint detection (EPD) especially. The EPD process control is crucial to manufacturability. In this paper, the characteristic of the motor-current EPD system, monitoring a direct STI CMP process with acid ceria-based slurry, has been studied on various STI gap-fill schemes. The EPD signals are sensitive to topographies, and show quadratic relationship between the processing time and overfill features.

AB - The aspect ratio (AR) of shallow isolation trench (STI) structures will increase as device feature size continues to shrink. Complicated HDP CVD processes or alternative gap-fill approaches, which lead to severe overfill topographies, will be proposed. However, those kinds of topographies will make great impacts on the STI CMP process, endpoint detection (EPD) especially. The EPD process control is crucial to manufacturability. In this paper, the characteristic of the motor-current EPD system, monitoring a direct STI CMP process with acid ceria-based slurry, has been studied on various STI gap-fill schemes. The EPD signals are sensitive to topographies, and show quadratic relationship between the processing time and overfill features.

UR - http://www.scopus.com/inward/record.url?scp=84888213487&partnerID=8YFLogxK

M3 - 论文

AN - SCOPUS:84888213487

SP - 119

EP - 122

T2 - 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006

Y2 - 21 February 2006 through 23 February 2006

ER -

Investigation of motor current EPD system monitoring a direct STI CMP process with ceria-based slurry for various STI gap-fill schemes

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