Investigation of semi-polar GaN Grown on (0001) C-plane nano-sized patterned-sapphire substrates

  • Vin Cent Su
  • , Po Hsun Chen
  • , Zheng Hung Hung
  • , Yao Hong You
  • , Yen Pu Chen
  • , Ta Cheng Hsu
  • , Yu Yao Lin
  • , Ray Ming Lin
  • , Chieh Hsiung Kuan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reported the growth of semi-polar GaN epi-layers on (0001) c-plane nano-sized patterned-sapphire substrates (c-NPSSs). In addition, the impact of c-NPSSs on the quality of semi-polar film had also been studied.

Original languageEnglish
Title of host publication2016 Conference on Lasers and Electro-Optics, CLEO 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580118
DOIs
StatePublished - 16 12 2016
Event2016 Conference on Lasers and Electro-Optics, CLEO 2016 - San Jose, United States
Duration: 05 06 201610 06 2016

Publication series

Name2016 Conference on Lasers and Electro-Optics, CLEO 2016

Conference

Conference2016 Conference on Lasers and Electro-Optics, CLEO 2016
Country/TerritoryUnited States
CitySan Jose
Period05/06/1610/06/16

Bibliographical note

Publisher Copyright:
© 2016 OSA.

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