Abstract
This paper reported the growth of semi-polar GaN epi-layers on (0001) c-plane nano-sized patterned-sapphire substrates (c-NPSSs). In addition, the impact of c-NPSSs on the quality of semi-polar film had also been studied.
| Original language | English |
|---|---|
| Article number | JTh2A.78 |
| Journal | Optics InfoBase Conference Papers |
| State | Published - 2016 |
| Event | CLEO: Applications and Technology, CLEO AT 2016 - San Jose, United States Duration: 05 06 2016 → 10 06 2016 |
Bibliographical note
Publisher Copyright:© OSA 2016.