| Translated title of the contribution | 室溫薄膜電晶體製作，使用電漿效應改善二氧化鉿介電層化學及電特性 |
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| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2015 |
| Externally published | Yes |
Investigation of the oxygen plasma effects on the chemical and electrical properties of HfO2 dielectrics for room-temperature thin-film transistors fabrication
穆荐年
Research output: Types of Thesis › Master's thesis