Light addressable potentiometric sensor with fluorine-terminated hafnium oxide layer for sodium detection

Cheng En Lue; Chao Sung Lai; Hsin Yu Chen; Chia Ming Yang

doi:10.1143/JJAP.49.04DL05

Light addressable potentiometric sensor with fluorine-terminated hafnium oxide layer for sodium detection

Cheng En Lue^*, Chao Sung Lai, Hsin Yu Chen, Chia Ming Yang

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

7 Scopus citations

Abstract

In this study, post-CF₄ plasma surface treatment of light addressable potentiometric sensor (LAPS) with a HfO₂-sensing membrane was carried out. pH sensitivity decreased but pNa sensitivity increased with fluorine incorporation. The highest pNa sensitivity was 31.8 mV/pNa, which was optimized with 3 min post CF₄ plasma treatment. The results showed a high possibility for sensing sodium ions using an inorganic-sensing membrane and a fabrication process. Moreover, on the basis of the analysis of atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) spectra, a sensing mechanism was developed.

Original language	English
Article number	04DL05
Journal	Japanese Journal of Applied Physics
Volume	49
Issue number	4 PART 2
DOIs	https://doi.org/10.1143/JJAP.49.04DL05
State	Published - 04 2010

Access to Document

10.1143/JJAP.49.04DL05

Cite this

@article{693977d15b0f4e33a81f7e6db931dd16,

title = "Light addressable potentiometric sensor with fluorine-terminated hafnium oxide layer for sodium detection",

abstract = "In this study, post-CF4 plasma surface treatment of light addressable potentiometric sensor (LAPS) with a HfO2-sensing membrane was carried out. pH sensitivity decreased but pNa sensitivity increased with fluorine incorporation. The highest pNa sensitivity was 31.8 mV/pNa, which was optimized with 3 min post CF4 plasma treatment. The results showed a high possibility for sensing sodium ions using an inorganic-sensing membrane and a fabrication process. Moreover, on the basis of the analysis of atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) spectra, a sensing mechanism was developed.",

author = "Lue, \{Cheng En\} and Lai, \{Chao Sung\} and Chen, \{Hsin Yu\} and Yang, \{Chia Ming\}",

year = "2010",

month = apr,

doi = "10.1143/JJAP.49.04DL05",

language = "英语",

volume = "49",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "4 PART 2",

}

TY - JOUR

T1 - Light addressable potentiometric sensor with fluorine-terminated hafnium oxide layer for sodium detection

AU - Lue, Cheng En

AU - Lai, Chao Sung

AU - Chen, Hsin Yu

AU - Yang, Chia Ming

PY - 2010/4

Y1 - 2010/4

N2 - In this study, post-CF4 plasma surface treatment of light addressable potentiometric sensor (LAPS) with a HfO2-sensing membrane was carried out. pH sensitivity decreased but pNa sensitivity increased with fluorine incorporation. The highest pNa sensitivity was 31.8 mV/pNa, which was optimized with 3 min post CF4 plasma treatment. The results showed a high possibility for sensing sodium ions using an inorganic-sensing membrane and a fabrication process. Moreover, on the basis of the analysis of atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) spectra, a sensing mechanism was developed.

AB - In this study, post-CF4 plasma surface treatment of light addressable potentiometric sensor (LAPS) with a HfO2-sensing membrane was carried out. pH sensitivity decreased but pNa sensitivity increased with fluorine incorporation. The highest pNa sensitivity was 31.8 mV/pNa, which was optimized with 3 min post CF4 plasma treatment. The results showed a high possibility for sensing sodium ions using an inorganic-sensing membrane and a fabrication process. Moreover, on the basis of the analysis of atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) spectra, a sensing mechanism was developed.

UR - https://www.scopus.com/pages/publications/77952702325

U2 - 10.1143/JJAP.49.04DL05

DO - 10.1143/JJAP.49.04DL05

M3 - 文章

AN - SCOPUS:77952702325

SN - 0021-4922

VL - 49

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 4 PART 2

M1 - 04DL05

ER -

Light addressable potentiometric sensor with fluorine-terminated hafnium oxide layer for sodium detection

Abstract

Access to Document

Other files and links

Fingerprint

Cite this