Light-immune pH sensor with SiC-based electrolyte-insulator-semiconductor structure

Material Science

• Electrolyte 100%
• Semiconductor Structure 100%
• Sensor 100%
• Oxide 66%
• Silicon Carbide 66%
• Membrane 33%
• Temperature 33%
• Semiconductor Material 33%
• Film 33%
• Hafnium 33%
• Gadolinium 33%

Engineering

• Silicon 66%
• Energy Gap 66%
• High Band 66%
• Sensing Membrane 33%
• Detection 33%
• Interference 33%
• Sensing Property 33%
• Environment 33%
• Atomic Layer Deposition 33%
• Deposited Film 33%
• Lower Temperature 33%
• Gap Semiconductor 33%