@inproceedings{6420f021565f4456a4f47ff66fd95167,
title = "Linear polarization modulation heterodyne ellipsometer using digital signal processing technique",
abstract = "In this research, a novel linear polarization modulation heterodyne ellipsometer (LPMHE) integrated with a digital signal processor is able to measure ellipsometric parameters of a specimen was developed. In this setup, a pair of orthogonally circularly polarized lights with slightly different frequency of the laser beam is used which behaves like a linear polarization rotator at high speed. By integrating with a digital storage oscilloscope, LPMHE is able to real-time measure ellipsometric parameters precisely. When the incident angles of laser beam are set at 60° and 70° in LPMHE, an accuracy of less than 0.7\% on ellipsometric parameters measurement of the SiO2 thin film deposited on silicon substrate was demonstrated.",
keywords = "dual-frequency laser, ellipsometry, heterodyne interferometry",
author = "Yu, \{Chih Jen\} and Chien Chou",
year = "2011",
doi = "10.1117/12.875103",
language = "英语",
isbn = "9780819484710",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Components and Materials VIII",
note = "Optical Components and Materials VIII ; Conference date: 25-01-2011 Through 26-01-2011",
}