Low current (5 pA) resistive switching memory using high-κ Ta 2O5 solid electrolyte

S. Maikap*, S. Z. Rahaman, T. Y. Wu, F. Chen, M. J. Kao, M. J. Tsai

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

15 Scopus citations

Abstract

Bipolar resistive switching memory device using high-κ Ta 2O5 solid electrolyte in a Cu/Ta2O 5/W structure with the device sizes from 0.2-8μm was investigated. This resistive memory device has a high threshold voltage of 0.75V, high resistance ratio (RHigh/RLow) of 3×I03, good endurance of > 103, and excellent retention at 150°C. The memory device with a low current operation of 5 pA is obtained, for the first time, owing to the Cu metallic chain formation in the high-κ Ta 2O5 solid electrolyte. The strong Cu chain formation is also confirmed by monitoring both the negative voltage and current observations. The low resistance state (RLow) decreases with increasing the current compliance from 5pA to 700μA, which can be useful for future multi-level data storage applications.

Original languageEnglish
Title of host publicationESSDERC 2009 - Proceedings of the 39th European Solid-State Device Research Conference
Pages217-220
Number of pages4
DOIs
StatePublished - 2009
Event39th European Solid-State Device Research Conference, ESSDERC 2009 - Athens, Greece
Duration: 14 09 200918 09 2009

Publication series

NameESSDERC 2009 - Proceedings of the 39th European Solid-State Device Research Conference

Conference

Conference39th European Solid-State Device Research Conference, ESSDERC 2009
Country/TerritoryGreece
CityAthens
Period14/09/0918/09/09

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