Low noise NMOSFET with overlaid metal gate

C. C. Hsiao*, M. S. Chen, Y. C. Chiang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

A new MOSFET device structure which adopts a overlaid-metal over poly-Si gate is proposed for using in RF low-noise amplification. Measurement result shows the minimum noise figure as well as the noise resistance of overlaid-metal gate MOSFET (OMGMOS) are smaller then conventional MOSFET. The equivalent circuit model of this OMGMOS device is generated and compared to that of the conventional MOSFET with same physical geometry. It shows the better noise characteristic of OMGMOS is mainly due to the decrease of the gate resistance.

Original languageEnglish
Pages (from-to)1711-1714
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume3
StatePublished - 1998
EventProceedings of the 1998 IEEE MTT-S International Microwave Symposium. Part 1 (of 3) - Baltimore, MD, USA
Duration: 07 06 199812 06 1998

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